PT  - JOURNAL ARTICLE
AU  - Pudis, Dusan
AU  - Kubicova, Jarmila
AU  - Suslik, Lubos
AU  - Skriniarova, Jaroslava
AU  - Martincek, Ivan
AU  - Novotny, Ivan
TI  - Patterning Techniques for Fabrication of Submicrometer Structures in Photoresist, III-V Semiconductors and PMMA
DP  - 2010 Jun 30
TA  - Communications - Scientific Letters of the University of Zilina
PG  - 53--57
VI  - 12
IP  - 2
AID - 10.26552/com.C.2010.2.53-57
IS  - 13354205
AB  - This paper presents experimental results in the field of planar periodic structures, their fabrication and analysis. We demonstrate techniques and experimental results of fabrication of two-dimensional periodic structures and their preparation in a thin photoresist layer, III-V semiconductors and PMMA - interference lithography using two coherent laser beams, nanoimprint lithography and lithography using nearfield scanning optical microscope.