Communications - Scientific Letters of the University of Zilina 2006, 8(1):39-42 | DOI: 10.26552/com.C.2006.1.39-42

Diamond and DLC Layers for a Wide Range of Aplications

Marian Vojs1, M. Vesely1
1 Slovak University of Technology, Faculty of Electrical Engineering and Information Technology, Bratislava, Slovak Republic

Diamond and diamond-like carbon (DLC) layers are nowadays of increasing importance for electrical and mechanical applications. In our laboratory we grow diamond on different substrates (Si, WC-Co) using Hot Filament Chemical Vapor Deposition (HF CVD)method improved by double biasing and DLC layers using pulsed arc system again on different substrates (Si, Ni, glass, Ti-6Al-4V, steel, WCCo). Growth parameters facilitate to control crystallinity of diamond layers from microcrystalline to nanocrystalline type. Mechanical, electrical and optical parameters are possible to change using doping with hydrogen, nitrogen, or oxygen. The goal of this article is to summarize recent results achieved in our laboratory related to applications of diamond and DLC layers for their use in sensors of hard metal in water and medical implantable joints.

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Published: March 31, 2006  Show citation

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Vojs, M., & Vesely, M. (2006). Diamond and DLC Layers for a Wide Range of Aplications. Communications - Scientific Letters of the University of Zilina, 8(1), 39-42. doi: 10.26552/com.C.2006.1.39-42
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