Communications - Scientific Letters of the University of Zilina 2017, 19(3):16-20 | DOI: 10.26552/com.C.2017.3.16-20

Polymer Based Devices for Photonics on the Chip

Daniel Jandura1, Peter Gaso1, Dusan Pudis1
1 Department of Physics, Faculty of Electrical Engineering, University of Zilina, Slovakia

In this paper we present promising technology for preparation of photonic devices based on polymer materials on the chip. We designed 2D and 3D structures in CAD (computer-aided design) software and we used two-photon polymerization mechanism for direct writing of these structures to IP-Dip photoresist material. This paper also deals with experimental procedures for preparation of polymer photonic devices on the chip and a new way of light coupling to devices on the chip. Morphological properties of prepared devices were investigated by scanning electron microscope (SEM). As a result, transmission spectrum characteristic was measured.

Keywords: waveguide; resonator; polymer; laser lithography

Published: September 30, 2017  Show citation

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Jandura, D., Gaso, P., & Pudis, D. (2017). Polymer Based Devices for Photonics on the Chip. Communications - Scientific Letters of the University of Zilina, 19(3), 16-20. doi: 10.26552/com.C.2017.3.16-20
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    References

    1. ALTISSIMO, M.: E-Beam Lithography for Micro-Nanofabrication. Biomicrofluidics, 4(2), 026503, 2010. Go to original source...
    2. DUMON, P., BOGAERTS, W., WIAUX, V., WOUTERS, J., BECKX, S., VAN CAMPENHOUT, D., TAILLAERT, B., LUYSSAERT, P., BIENSTMAN, D., VAN THOURHOUT, J., BAETS, R.: Low-Loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography. IEEE Photonics Technology Letters, 16(5), 1328-1330, 2004. Go to original source...
    3. SAMANTA, S., BANERJI, P., GANGULY, P.: Focused Ion Beam Fabrication of SU-8 Waveguide Structures on Oxidized Silicon. MRS Advances, 2(18), 1-6, 2017. Go to original source...
    4. SCHUMANN, M., BUCKMANN, T., GRUHLER, N., WEGENER, M., PERNICE, W.: Hybrid 2D-3D Optical Devices for Integrated Optics by Direct Laser Writing. Light: Science & applications, 3, 1-9, 2014. Go to original source...
    5. MARTINCEK, I., PUDIS, D.: D-Shaped Core Polysiloxane Waveguide with Surface Relief Bragg Grating. Optik, 127(20), 10031-10035, 2016. Go to original source...
    6. UDALAGAMA, C. N. B., CHAN, S. F., HOMHUAN, S., BETTIOL, A. A., WOHLAND, T., WATT, F.: Fabrication of Integrated Channel Waveguides in Polydimethylsiloxane (PDMS) Using Proton Beam Writing (PBW): Applications for Fluorescence Detection in Microfluidic Channels. Proc. of SPIE 6882, 68820D, 2008. Go to original source...
    7. ELDADA, L., SHACKLETTE, L. W.: Advances in Polymer Integrated Optics. IEEE Journal of Selected Topics in Quantum Electronics, 6(1), 54-68, 2000. Go to original source...
    8. PUDIS, D., JANDURA, D., GASO, P., SUSLIK, L., HRONEC, P., MARTINCEK, I., KOVAC, J., BEREZINA, S.: PDMS-Based Nanoimprint Lithography for Photonics. Communications - Scientific Letters of the University of Zilina, 16(1), 15-20, 2014. Go to original source...
    9. GISSIBL, T., THIELE, S., HERKOMMER, A., GIESSEN, H.: Two-Photon Direct Laser Writing of Ultracompact Multi-Lens Objectives. Nature Photonics, 10, 554-560, 2016. Go to original source...
    10. LINDENMANN, N., BALTHASAR, N. G., HILLERKUSS, D., SCHMOGROW, R., JORDAN, M., LEUTHOLD, J. W., FREUDE, W., KOOS, C.: Photonic Wire Bonding: A Novel Concept for Chip-Scale Interconnects. Optics Express, 20(16), 17667-17677, 2012. Go to original source...
    11. Nanoscribe [online]. Date: 06/02/2017. Available: http://www.nanoscribe.de/en.
    12. FREYMANN, G., LEDERMANN, A., THIEL, M., STAUDE, I., ESSIG, S., BUSCH, K., WEGENER, M.: Three-Dimensional Nanostructures for Photonics. Advanced Functional Materials, 20(7), 1038-1052, 2010. Go to original source...

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